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Inpria Raises $23.5M in Series B

CORVALLIS, OR, Pioneer in high-resolution metal oxide photoresists for extreme ultraviolet lithography (EUV), today announced that it has secured $23.5 million in Series B funding.
Inpria, a pioneer in high-resolution metal oxide photoresists for extreme ultraviolet lithography (EUV), today announced that it has secured $23.5 million in Series B funding from a stellar syndicate representing leading players from across the semiconductor manufacturing ecosystem. This new financing was led by existing investor, Samsung Ventures, and included participation from current investors ALIAD (Air Liquide's venture capital investment arm), Applied Ventures (the venture capital arm of Applied Materials, Inc.), and Intel Capital. Leading photoresist supplier JSR Corporation also joined this round as a new investor. Fueled by growing customer demand, Inpria will use the funds to complete its pilot manufacturing facility and to commence commercial production. The company intends to grow its workforce to support more customer engagements through the joint development of integrated processes for the industry's most advanced production environments.

"The photoresist that Inpria has pioneered is innovative and demonstrates promise," said Dong-Su Kim, General Manager of Samsung Ventures America. "We are excited to broaden and deepen our corporate partnership and support Inpria to deliver on its potential through the investment."

Comprised of tin-oxide molecules, Inpria photoresists offer greatly improved resolution with building blocks a fraction the size of traditional polymer-based resists. At the same time, these materials can quadruple the efficiency with which EUV photons are absorbed, thereby improving sensitivity and reducing pattern variability. With unparalleled etch selectivity, Inpria photoresists (essentially patternable hardmasks) enable simpler manufacturing flows and larger process windows for an overall reduction in manufacturing cost.

"This strong strategic backing from ecosystem players, including customers as well as equipment and material partners, signals their shared excitement and confidence in the importance of our products to benefit EUV lithography specifically, and more generally the entire semiconductor industry," said Andrew Grenville, CEO of Inpria. "We are privileged to work closely with these strategic partners in ensuring that our materials are compatible with all aspects of equipment and process requirements. Inpria remains focused on the execution of our growth plan in order to enable, support and accelerate the adoption of EUV lithography in manufacturing."

About Inpria

Inpria Corporation designs photoresists to unlock the full potential of EUV lithography. Inpria's metal oxide photoresists for EUV enable superior performance with simplified processing. By focusing on emerging requirements, Inpria has developed the only purpose-built solution to support EUV lithography at the 7nm process node and beyond. Learn more at

About Samsung Ventures

Samsung Venture Investment Corporation manages investment and investment-related activities for Samsung affiliate companies. The investment mandate for Samsung Venture Investment Corporation tracks closely to the strategic priorities of Samsung affiliate companies' core operating divisions, and encompasses investments in semiconductors, displays, telecommunications, and consumer electronics.


Created in 2013, ALIAD's role is to acquire minority equity stakes in innovative technology start-ups in order to foster Air Liquide's access to technological innovations developed outside the Group. These equity investments are accompanied by the implementation of preferred R&D and/or business agreements between these start-ups and Air Liquide group entities. ALIAD targets three sectors of investment related to important social changes: energy transition, healthcare, digital.

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About Applied Ventures

Applied Ventures, LLC, the venture capital arm of Applied Materials, invests in early-stage technology companies that promise to deliver high growth and exceptional returns. Our investments help develop technologies and markets that provide natural extensions to Applied Materials' core business and stimulate the growth of applications for semiconductors, displays, and related products and services. Learn more at

About Intel Capital

Intel Capital, Intel's strategic investment organization, invests in innovative startups targeting computing and smart devices, 5G connectivity, cloud, datacenter, artificial intelligence, merged reality, autonomous driving, the Internet of Things, robotic technologies, immersive entertainment and semiconductor manufacturing. Since 1991, Intel Capital has invested US$12.2 billion in 1,480 companies worldwide, and 627 portfolio companies have gone public or been acquired. Through its business development programs, Intel Capital curates thousands of introductions each year between its portfolio executives and Intel's customers and partners in the Global 2000. For more information on what makes Intel Capital one of the world's most powerful venture capital firms, visit or follow @Intelcapital.

About JSR Corporation

JSR Corporation is a multinational company employing more than 6,000 people worldwide and a leading materials supplier in a variety of technology driven markets. JSR's global network is headquartered in Tokyo (Japan) and has factories and offices in Europe, USA, China, Taiwan, Korea, Singapore and Thailand. JSR is a research-oriented organization that pursues close collaborations with leading innovators in a number of industries that are a key to the present and future welfare of human society: life-sciences, energy storage, synthetic rubbers, electronic materials, display and optical materials. For more information about JSR Corporation, please go to
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