EUV Tech, a global leader in the production of metrology equipment to enable leading-edge semiconductor manufacturing using extreme ultraviolet lithography (EUVL), secured Series A funding led by Intel Capital. EUV Tech will use the capital to support its worldwide installed base of equipment, enhance its existing product line and deliver several new innovative products already under development.

Founded in 1997, EUV Tech enables the frontiers of semiconductor manufacturing and material science through the development of world leading EUV and soft-x-ray instrumentation and techniques.